• Information & Opto-Energy Materials (IOEM) Laboratory
  • Kentech 정보·광에너지 소재 연구실

Journal
Interfacial reaction and formation mechanism of epitaxial CoSi2 by rapid thermal annealing in Co/Ti/Si (100) system 1997
  • Year of publication

    2010년 이전

  • Author

    G.B.Kim, J.S.Kwak, H.K.Baik, S.-M.Lee

  • Journal

    J. Appl. Phys.

  • Volume

    82

  • Page

    2323-2328

.