Reaction of Co and capping layers and its effect on CoSi2 formation in Si/SiOx/Co system 2000

• Year of publication

  2010년 이전

• Author

  G.B.Kim, J.S.Kwak, H.K.Baik, S.-M.Lee, S.H.Oh, C.G.Park

• Journal

  Appl. Phys. Lett.

• Volume

  77

• Page

  1443-1445