Characteristics of diodes prepared using epitaxial CoSi2 as a boron diffusion source 2000
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Year of publication
2010년 이전
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Author
G.B.Kim, J.S.Kwak, S.-M.Lee, H.K.Baik.
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Journal
J. Vac. Sci. Tech.
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Volume
B18
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Page
2576-2578