Ex-situ formation of oxide-interlayer-mediated-epitaxial CoSi2 film using Ti-capping 1999
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Year of publication
2010년 이전
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Author
G.B.Kim, J.S.Kwak, H.K.Baik, S.-M.Lee
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Journal
J. Vac. Sci. Tech. B
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Volume
17
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Page
162-165