• Information & Opto-Energy Materials (IOEM) Laboratory
  • Kentech 정보·광에너지 소재 연구실

Journal
Suppression of silicide formation in Ta/Si system by ion-beam-assisted deposition 1997
  • Year of publication

    2010년 이전

  • Author

    J.S.Kwak, H.K.Baik, J.H.Kim, S.-M.Lee

  • Journal

    Appl. Phys. Lett.

  • Volume

    71

  • Page

    2451-2453

.