Impact of Plasma Electron Flux on Plasma Damage-Free Sputtering of Ultrathin Tin-Doped Indium Oxide Contact Layer on p-GaN for InGaN/GaN Light-Emitting Diodes 2018

• Year of publication

  2018

• Author

  K. J. Son, T. K. Kim, Y.-J. Cha, S. K. Oh, S.-J. You, J.-H. Ryou, and J. S. Kwak

• Journal

  Advanced Science

• Volume

  5

• Page

  1700637