Formation of laser diode ridges by the dry-etching of Pd and AlGaN/GaN superlattices 2016

• Year of publication

  2016

• Author

  J.-K. Kim, S.-N. Lee, M.-J. Park, J. S. Kwak, K.-B. Kim, and J.-M. Lee

• Journal

  Surface & Coatings Technology

• Volume

  307

• Page

  1107–1111