Improved package reliability of AlGaN/GaN HFETs on 150 mm Si substrates by SiNx/polyimide dual passivation layers 2016

• Year of publication

  2016

• Author

  S. K. Oh, T. Jang, Y. J. Jo, H.-Y. Ko, and J. S. Kwak

• Journal

  Surface & Coatings Technology

• Volume

  307

• Page

  1124–1128