Fully crystallized ultrathin ITO films deposited by sputtering with in-situ electron beam irradiation for touch-sensitive screens 2014
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Year of publication
2014
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Author
S.-M. Wie, C.-H. Hong, S. K. Oh, W.-S. Cheong, Y. J. Yoon, and J. S. Kwak
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Journal
Ceramics International
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Volume
40
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Page
11163–11169