Linear facing target sputtering of the epitaxial Ga-doped ZnO transparent contact layer on GaN-based light-emitting diodes 2013

• Year of publication

  2013

• Author

  H.-S. Shin, J.-H. Lee, J. S. Kwak, H. H. Lee and H.-K. Kim

• Journal

  Journal of Physics D: Applied Physics

• Volume

  46

• Page

  415301