Low resistance ohmic contacts to amorphous IGZO thin films by hydrogen plasma treatment 2012

• Year of publication

  2012

• Author

  S.-H. Yang, J. Y. Kim, M. J. Park, K.-H. Choi, J. S. Kwak, H.-K. Kim, J.-M. Lee

• Journal

  Surface & Coatings Technology

• Volume

  206

• Page

  5067–5071