Wet Chemical Etching of Zn-Containing Oxide and HfO2 Films 2010

• Year of publication

  2010

• Author

  J.-K. Kim, J. Y. Kim, S.-C. Han, J. S. Kwak, H.-K. Kim, and J.-M. Lee

• Journal

  Journal of the Electrochemical Society

• Volume

  157

• Page

  D462-D465